CO2 Automatic Cleaner : C3100

 โพสต์เมื่อ : 31 ม.ค 2563 เวลา 4:20 น.
c3100

c3100

CO2 Automatic Cleaner :  C3100

  • Cassette loading, automatic cleaning, dual cleaning chambers.
  • Cleaning Target : Glass/ISM/TSV wafer (12'') with ring frame.
  • CO2 Jet Cleaner : SM201/S201/SS201 (selectable)
  • Cleaning Mode   : Spinning
  • Cleaning Area    : Max. 300mm in diameter
  • Dimension : 200L x 1700W x 1900H mm
  • Utilities : 220VAC,50/60Hz, 1 phase, 20A

                      CDA : 5 - 8 kg/cm2

  • Options : Suction unit/ULPA filter