High Volume Plasma System : QUADRIO α
โพสต์เมื่อ : 6 พ.ย 2563 เวลา 7:40 น.
High Volume Plasma System : QUADRIOα

- Quadrioα is a compact standalone plasma cleaning system suitable for substrates with a strip form factor.
- Capable of performing PE and RIE processes, the Quadrioα provides high uniformity reliable results with a competitive throughput.
- A dry vacuum pump contained in the body of the machine.
- An anti-jam system that protects the substrates, with automatic recovery function.
- Throughput capability is measured with 10 sec plasma time.
- Organic decontamination and surface activation of lead frames prior to wire bonding.
- Adhesion promoter prior to molding.
- Adhesion promoter of die attach materials on lead frames or PBGA strips.
- Adhesion promoter for flip chip packages prior to underfill.
- Flux removal from semiconductor packages or hybrids.
- General activation, cleaning and decontamination.